| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YDa/KfPEp |
| Repository | sid.inpe.br/iris@1916/2006/02.23.13.40 (restricted access) |
| Last Update | 2006:02.23.13.40.00 (UTC) marciana |
| Metadata Repository | sid.inpe.br/iris@1916/2006/02.23.13.40.17 |
| Metadata Last Update | 2018:06.05.01.28.34 (UTC) administrator |
| Secondary Key | INPE-13550-PRE/8763 |
| ISSN | 0093-3813 |
| Citation Key | RossiUedaBarrSpas:2000:HaPu60 |
| Title | A hard-tube pulser of 60 kV, 10 a for experiment and modeling in plasma immersion ion implantation  |
| Project | Implantação Iônica por Imersão em Plasma (IIIP) |
| Year | 2000 |
| Month | Oct |
| Access Date | 2024, May 18 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 88 KiB |
| 2. Context | |
| Author | 1 Rossi, José Osvaldo 2 Ueda, Mário 3 Barroso de Castro, Joaquim José 4 Spassov, V. A. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHJ5 2 8JMKD3MGP5W/3C9JHSB 3 8JMKD3MGP5W/3C9JHFA |
| Group | 1 LAP-INPE-MCT-BR 2 LAP-INPE-MCT-BR 3 LAP-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Plasmas, (INPE. LAP) 2 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Plasmas, (INPE. LAP) 3 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Plasmas, (INPE. LAP) |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 28 |
| Number | 5 |
| Pages | 1392-1396 |
| History (UTC) | 2006-02-23 13:40:17 :: vinicius -> administrator :: 2007-04-25 13:51:24 :: administrator -> vinicius :: 2008-01-14 12:15:30 :: vinicius -> administrator :: 2008-06-10 22:25:24 :: administrator -> vinicius :: 2011-05-30 02:36:47 :: vinicius -> administrator :: 2014-04-16 17:25:21 :: administrator -> marciana :: 2000 2014-08-20 13:47:32 :: marciana -> administrator :: 2000 2018-06-05 01:28:34 :: administrator -> marciana :: 2000 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Version Type | publisher |
| Keywords | PLASMA Hard tube pulser Pigh-voltage pulse generator Ion implantation Plasma immersion ion implantation Generator PLASMA Gerador de pulso de alta voltagem Implantação iônica Implantação iônica por imersão em plasma Gerador |
| Abstract | This paper describes an experiment and modeling in plasma immersion ion implantation using a high-voltage pulsed power system. This consists of a high-voltage pulse generator that uses a hard tube switch. The reason for using this type of circuit category in the Plasma Immersion Ion Implantation (PIII) facility rattler than a previously used pulse-forming network (PFN) circuit configuration is stated. The experimental results of the application of this device to a glow discharge PIII are also discussed. In order to assess these results, a simple electrical model describes the plasma as a resistive load in parallel with a capacitance taking into account the pulse rise-time distortion caused bg a long connecting coaxial cable. Plasma parameters for Pm processing, such as ion average implantation current and plasma sheath thickness, are calculated from the experimental settings. |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > A hard-tube pulser... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | 12.pdf |
| User Group | administrator marciana vinicius |
| Reader Group | administrator marciana |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher allowfinaldraft |
| Read Permission | deny from all and allow from 150.163 |
| Update Permission | not transferred |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Citing Item List | sid.inpe.br/mtc-m21/2012/07.13.14.52.24 2 sid.inpe.br/mtc-m21/2012/07.13.14.56.06 1 sid.inpe.br/bibdigital/2013/09.25.21.49 1 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX; IEEEXplore. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |